2/22/2011	10:01:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2011	10:01:56 AM	Recipe started at 10:01 AM
2/22/2011	10:01:56 AM	H2 valve closed
2/22/2011	10:01:56 AM	BCl3 valve closed
2/22/2011	10:01:56 AM	PH3 valve closed
2/22/2011	10:01:56 AM	SiCl4 pre valve closed
2/22/2011	10:01:56 AM	SiCl4 post valve closed
2/22/2011	10:01:56 AM	Main Vac valve closed
2/22/2011	10:01:56 AM	Bypass valve closed
2/22/2011	10:01:56 AM	Bubbler valve closed
2/22/2011	10:01:56 AM	Helium valve opened
2/22/2011	10:01:56 AM	Helium MFC set to  500.000000
2/22/2011	10:01:56 AM	H2 MFC set to  0.000000
2/22/2011	10:01:56 AM	BCl3 MFC set to  0.000000
2/22/2011	10:01:56 AM	PHl3 MFC set to  0.000000
2/22/2011	10:01:56 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:01:56 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:01:57 AM	Tube furnace set to 0
2/22/2011	10:03:17 AM	Helium valve closed
2/22/2011	10:03:17 AM	H2 valve closed
2/22/2011	10:03:17 AM	BCl3 valve closed
2/22/2011	10:03:17 AM	PH3 valve closed
2/22/2011	10:03:17 AM	SiCl4 pre valve closed
2/22/2011	10:03:17 AM	SiCl4 post valve closed
2/22/2011	10:03:17 AM	Main Vac valve closed
2/22/2011	10:03:17 AM	Bypass valve closed
2/22/2011	10:03:17 AM	Bubbler valve closed
2/22/2011	10:03:17 AM	Helium MFC set to  0.000000
2/22/2011	10:03:17 AM	H2 MFC set to  0.000000
2/22/2011	10:03:17 AM	BCl3 MFC set to  0.000000
2/22/2011	10:03:17 AM	PHl3 MFC set to  0.000000
2/22/2011	10:03:17 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:03:17 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:03:17 AM	Tube furnace set to 0
2/22/2011	10:03:18 AM	Run finished at 10:03 AM
2/22/2011	10:03:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2011	10:03:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	10:03:34 AM	Recipe started at 10:03 AM
2/22/2011	10:03:34 AM	Helium valve closed
2/22/2011	10:03:34 AM	H2 valve closed
2/22/2011	10:03:34 AM	BCl3 valve closed
2/22/2011	10:03:34 AM	PH3 valve closed
2/22/2011	10:03:34 AM	SiCl4 pre valve closed
2/22/2011	10:03:34 AM	SiCl4 post valve closed
2/22/2011	10:03:34 AM	Main Vac valve closed
2/22/2011	10:03:34 AM	Bubbler valve closed
2/22/2011	10:03:34 AM	Bypass valve opened
2/22/2011	10:03:34 AM	Helium MFC set to  0.000000
2/22/2011	10:03:34 AM	H2 MFC set to  0.000000
2/22/2011	10:03:34 AM	BCl3 MFC set to  0.000000
2/22/2011	10:03:34 AM	PHl3 MFC set to  0.000000
2/22/2011	10:03:34 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:03:34 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:03:34 AM	Tube furnace set to 0
2/22/2011	10:03:57 AM	Helium valve closed
2/22/2011	10:03:57 AM	H2 valve closed
2/22/2011	10:03:57 AM	BCl3 valve closed
2/22/2011	10:03:57 AM	PH3 valve closed
2/22/2011	10:03:57 AM	SiCl4 pre valve closed
2/22/2011	10:03:57 AM	SiCl4 post valve closed
2/22/2011	10:03:57 AM	Bubbler valve closed
2/22/2011	10:03:57 AM	Main Vac valve opened
2/22/2011	10:03:57 AM	Bypass valve opened
2/22/2011	10:03:57 AM	Helium MFC set to  0.000000
2/22/2011	10:03:57 AM	H2 MFC set to  0.000000
2/22/2011	10:03:57 AM	BCl3 MFC set to  0.000000
2/22/2011	10:03:57 AM	PHl3 MFC set to  0.000000
2/22/2011	10:03:57 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:03:57 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:03:57 AM	Tube furnace set to 0
2/22/2011	10:03:57 AM	Run finished at 10:03 AM
2/22/2011	10:03:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	10:08:34 AM	H2 MFC set to  10.000000
2/22/2011	10:08:35 AM	H2 valve opened
2/22/2011	10:08:38 AM	H2 valve closed
2/22/2011	10:31:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2011	10:31:00 AM	Recipe started at 10:31 AM
2/22/2011	10:31:00 AM	H2 valve closed
2/22/2011	10:31:00 AM	BCl3 valve closed
2/22/2011	10:31:00 AM	PH3 valve closed
2/22/2011	10:31:00 AM	SiCl4 pre valve closed
2/22/2011	10:31:00 AM	SiCl4 post valve closed
2/22/2011	10:31:00 AM	Main Vac valve closed
2/22/2011	10:31:00 AM	Bypass valve closed
2/22/2011	10:31:00 AM	Bubbler valve closed
2/22/2011	10:31:00 AM	Helium valve opened
2/22/2011	10:31:00 AM	Helium MFC set to  500.000000
2/22/2011	10:31:00 AM	H2 MFC set to  0.000000
2/22/2011	10:31:00 AM	BCl3 MFC set to  0.000000
2/22/2011	10:31:00 AM	PHl3 MFC set to  0.000000
2/22/2011	10:31:00 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:31:00 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:31:01 AM	Tube furnace set to 0
2/22/2011	10:32:21 AM	Helium valve closed
2/22/2011	10:32:21 AM	H2 valve closed
2/22/2011	10:32:21 AM	BCl3 valve closed
2/22/2011	10:32:21 AM	PH3 valve closed
2/22/2011	10:32:21 AM	SiCl4 pre valve closed
2/22/2011	10:32:21 AM	SiCl4 post valve closed
2/22/2011	10:32:21 AM	Main Vac valve closed
2/22/2011	10:32:21 AM	Bypass valve closed
2/22/2011	10:32:21 AM	Bubbler valve closed
2/22/2011	10:32:21 AM	Helium MFC set to  0.000000
2/22/2011	10:32:21 AM	H2 MFC set to  0.000000
2/22/2011	10:32:21 AM	BCl3 MFC set to  0.000000
2/22/2011	10:32:21 AM	PHl3 MFC set to  0.000000
2/22/2011	10:32:21 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:32:21 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:32:21 AM	Tube furnace set to 0
2/22/2011	10:32:22 AM	Run finished at 10:32 AM
2/22/2011	10:32:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2011	10:38:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	10:38:53 AM	Recipe started at 10:38 AM
2/22/2011	10:38:54 AM	Helium valve closed
2/22/2011	10:38:54 AM	H2 valve closed
2/22/2011	10:38:54 AM	BCl3 valve closed
2/22/2011	10:38:54 AM	PH3 valve closed
2/22/2011	10:38:54 AM	SiCl4 pre valve closed
2/22/2011	10:38:54 AM	SiCl4 post valve closed
2/22/2011	10:38:54 AM	Main Vac valve closed
2/22/2011	10:38:54 AM	Bubbler valve closed
2/22/2011	10:38:54 AM	Bypass valve opened
2/22/2011	10:38:54 AM	Helium MFC set to  0.000000
2/22/2011	10:38:54 AM	H2 MFC set to  0.000000
2/22/2011	10:38:54 AM	BCl3 MFC set to  0.000000
2/22/2011	10:38:54 AM	PHl3 MFC set to  0.000000
2/22/2011	10:38:54 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:38:54 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:38:54 AM	Tube furnace set to 0
2/22/2011	10:39:25 AM	Helium valve closed
2/22/2011	10:39:25 AM	H2 valve closed
2/22/2011	10:39:25 AM	BCl3 valve closed
2/22/2011	10:39:25 AM	PH3 valve closed
2/22/2011	10:39:25 AM	SiCl4 pre valve closed
2/22/2011	10:39:25 AM	SiCl4 post valve closed
2/22/2011	10:39:25 AM	Bubbler valve closed
2/22/2011	10:39:25 AM	Main Vac valve opened
2/22/2011	10:39:25 AM	Bypass valve opened
2/22/2011	10:39:25 AM	Helium MFC set to  0.000000
2/22/2011	10:39:25 AM	H2 MFC set to  0.000000
2/22/2011	10:39:25 AM	BCl3 MFC set to  0.000000
2/22/2011	10:39:25 AM	PHl3 MFC set to  0.000000
2/22/2011	10:39:25 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:39:25 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:39:25 AM	Tube furnace set to 0
2/22/2011	10:39:25 AM	Run finished at 10:39 AM
2/22/2011	10:39:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	10:39:34 AM	Helium MFC set to  100.000000
2/22/2011	10:39:35 AM	Helium valve opened
2/22/2011	10:41:06 AM	Helium valve closed
2/22/2011	10:42:49 AM	Helium valve opened
2/22/2011	10:42:52 AM	Helium valve closed
2/22/2011	10:43:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2011	10:43:29 AM	Recipe started at 10:43 AM
2/22/2011	10:43:29 AM	H2 valve closed
2/22/2011	10:43:29 AM	BCl3 valve closed
2/22/2011	10:43:29 AM	PH3 valve closed
2/22/2011	10:43:29 AM	SiCl4 pre valve closed
2/22/2011	10:43:29 AM	SiCl4 post valve closed
2/22/2011	10:43:29 AM	Main Vac valve closed
2/22/2011	10:43:29 AM	Bypass valve closed
2/22/2011	10:43:29 AM	Bubbler valve closed
2/22/2011	10:43:29 AM	Helium valve opened
2/22/2011	10:43:29 AM	Helium MFC set to  500.000000
2/22/2011	10:43:29 AM	H2 MFC set to  0.000000
2/22/2011	10:43:29 AM	BCl3 MFC set to  0.000000
2/22/2011	10:43:29 AM	PHl3 MFC set to  0.000000
2/22/2011	10:43:29 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:43:29 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:43:29 AM	Tube furnace set to 0
2/22/2011	10:44:50 AM	Helium valve closed
2/22/2011	10:44:50 AM	H2 valve closed
2/22/2011	10:44:50 AM	BCl3 valve closed
2/22/2011	10:44:50 AM	PH3 valve closed
2/22/2011	10:44:50 AM	SiCl4 pre valve closed
2/22/2011	10:44:50 AM	SiCl4 post valve closed
2/22/2011	10:44:50 AM	Main Vac valve closed
2/22/2011	10:44:50 AM	Bypass valve closed
2/22/2011	10:44:50 AM	Bubbler valve closed
2/22/2011	10:44:50 AM	Helium MFC set to  0.000000
2/22/2011	10:44:50 AM	H2 MFC set to  0.000000
2/22/2011	10:44:50 AM	BCl3 MFC set to  0.000000
2/22/2011	10:44:50 AM	PHl3 MFC set to  0.000000
2/22/2011	10:44:50 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:44:50 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:44:50 AM	Tube furnace set to 0
2/22/2011	10:44:50 AM	Run finished at 10:44 AM
2/22/2011	10:44:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2011	10:47:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	10:47:03 AM	Recipe started at 10:47 AM
2/22/2011	10:47:03 AM	Helium valve closed
2/22/2011	10:47:03 AM	H2 valve closed
2/22/2011	10:47:03 AM	BCl3 valve closed
2/22/2011	10:47:03 AM	PH3 valve closed
2/22/2011	10:47:03 AM	SiCl4 pre valve closed
2/22/2011	10:47:03 AM	SiCl4 post valve closed
2/22/2011	10:47:03 AM	Main Vac valve closed
2/22/2011	10:47:03 AM	Bubbler valve closed
2/22/2011	10:47:03 AM	Bypass valve opened
2/22/2011	10:47:03 AM	Helium MFC set to  0.000000
2/22/2011	10:47:03 AM	H2 MFC set to  0.000000
2/22/2011	10:47:03 AM	BCl3 MFC set to  0.000000
2/22/2011	10:47:03 AM	PHl3 MFC set to  0.000000
2/22/2011	10:47:03 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:47:03 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:47:03 AM	Tube furnace set to 0
2/22/2011	10:47:34 AM	Helium valve closed
2/22/2011	10:47:34 AM	H2 valve closed
2/22/2011	10:47:34 AM	BCl3 valve closed
2/22/2011	10:47:34 AM	PH3 valve closed
2/22/2011	10:47:34 AM	SiCl4 pre valve closed
2/22/2011	10:47:34 AM	SiCl4 post valve closed
2/22/2011	10:47:34 AM	Bubbler valve closed
2/22/2011	10:47:34 AM	Main Vac valve opened
2/22/2011	10:47:34 AM	Bypass valve opened
2/22/2011	10:47:34 AM	Helium MFC set to  0.000000
2/22/2011	10:47:34 AM	H2 MFC set to  0.000000
2/22/2011	10:47:34 AM	BCl3 MFC set to  0.000000
2/22/2011	10:47:34 AM	PHl3 MFC set to  0.000000
2/22/2011	10:47:34 AM	SiCl4 MFC set to  0.000000
2/22/2011	10:47:34 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	10:47:34 AM	Tube furnace set to 0
2/22/2011	10:47:35 AM	Run finished at 10:47 AM
2/22/2011	10:47:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	10:48:52 AM	Helium MFC set to  50.000000
2/22/2011	10:48:52 AM	Helium valve opened
2/22/2011	10:56:35 AM	Helium valve closed
2/22/2011	10:57:25 AM	Helium valve opened
2/22/2011	11:12:38 AM	Helium valve closed
2/22/2011	11:15:50 AM	Bypass valve closed
2/22/2011	11:15:50 AM	Main Vac valve closed
2/22/2011	11:16:02 AM	Main Vac valve opened
2/22/2011	11:16:03 AM	Bypass valve opened
2/22/2011	11:18:49 AM	Helium valve opened
2/22/2011	11:19:45 AM	Helium valve closed
2/22/2011	11:19:49 AM	Helium valve opened
2/22/2011	11:20:44 AM	Helium valve closed
2/22/2011	11:22:22 AM	Recipe started at 11:22 AM
2/22/2011	11:22:22 AM	Helium valve closed
2/22/2011	11:22:22 AM	BCl3 valve closed
2/22/2011	11:22:22 AM	PH3 valve closed
2/22/2011	11:22:22 AM	SiCl4 pre valve closed
2/22/2011	11:22:22 AM	SiCl4 post valve closed
2/22/2011	11:22:22 AM	Main Vac valve closed
2/22/2011	11:22:22 AM	Bypass valve closed
2/22/2011	11:22:22 AM	Bubbler valve closed
2/22/2011	11:22:22 AM	H2 valve opened
2/22/2011	11:22:22 AM	Helium MFC set to  0.000000
2/22/2011	11:22:22 AM	H2 MFC set to  500.000000
2/22/2011	11:22:22 AM	BCl3 MFC set to  0.000000
2/22/2011	11:22:22 AM	PHl3 MFC set to  0.000000
2/22/2011	11:22:22 AM	SiCl4 MFC set to  0.000000
2/22/2011	11:22:23 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	11:22:23 AM	Tube furnace set to 0
2/22/2011	11:23:46 AM	Helium valve closed
2/22/2011	11:23:46 AM	BCl3 valve closed
2/22/2011	11:23:46 AM	PH3 valve closed
2/22/2011	11:23:46 AM	SiCl4 pre valve closed
2/22/2011	11:23:46 AM	SiCl4 post valve closed
2/22/2011	11:23:46 AM	Main Vac valve closed
2/22/2011	11:23:46 AM	Bypass valve closed
2/22/2011	11:23:46 AM	H2 valve opened
2/22/2011	11:23:46 AM	Bubbler valve opened
2/22/2011	11:23:46 AM	Helium MFC set to  0.000000
2/22/2011	11:23:46 AM	H2 MFC set to  500.000000
2/22/2011	11:23:46 AM	BCl3 MFC set to  0.000000
2/22/2011	11:23:46 AM	PHl3 MFC set to  0.000000
2/22/2011	11:23:46 AM	SiCl4 MFC set to  0.000000
2/22/2011	11:23:46 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	11:23:46 AM	Tube furnace set to 1000
2/22/2011	11:43:46 AM	Helium valve closed
2/22/2011	11:43:46 AM	BCl3 valve closed
2/22/2011	11:43:46 AM	PH3 valve closed
2/22/2011	11:43:46 AM	Main Vac valve closed
2/22/2011	11:43:46 AM	Bypass valve closed
2/22/2011	11:43:46 AM	H2 valve opened
2/22/2011	11:43:46 AM	SiCl4 pre valve opened
2/22/2011	11:43:46 AM	SiCl4 post valve opened
2/22/2011	11:43:46 AM	Bubbler valve opened
2/22/2011	11:43:46 AM	Helium MFC set to  0.000000
2/22/2011	11:43:46 AM	H2 MFC set to  500.000000
2/22/2011	11:43:46 AM	BCl3 MFC set to  0.000000
2/22/2011	11:43:46 AM	PHl3 MFC set to  0.000000
2/22/2011	11:43:46 AM	SiCl4 MFC set to  50.000000
2/22/2011	11:43:46 AM	Bypass solenoid MFC set to  0.000000
2/22/2011	11:43:46 AM	Tube furnace set to 1000
2/22/2011	12:03:46 PM	H2 valve closed
2/22/2011	12:03:46 PM	BCl3 valve closed
2/22/2011	12:03:46 PM	PH3 valve closed
2/22/2011	12:03:46 PM	SiCl4 pre valve closed
2/22/2011	12:03:46 PM	SiCl4 post valve closed
2/22/2011	12:03:46 PM	Main Vac valve closed
2/22/2011	12:03:46 PM	Bypass valve closed
2/22/2011	12:03:46 PM	Helium valve opened
2/22/2011	12:03:46 PM	Bubbler valve opened
2/22/2011	12:03:46 PM	Helium MFC set to  500.000000
2/22/2011	12:03:46 PM	H2 MFC set to  0.000000
2/22/2011	12:03:46 PM	BCl3 MFC set to  0.000000
2/22/2011	12:03:46 PM	PHl3 MFC set to  0.000000
2/22/2011	12:03:46 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:03:46 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:03:46 PM	Tube furnace set to 0
2/22/2011	12:21:56 PM	H2 valve closed
2/22/2011	12:21:56 PM	BCl3 valve closed
2/22/2011	12:21:56 PM	PH3 valve closed
2/22/2011	12:21:56 PM	SiCl4 pre valve closed
2/22/2011	12:21:56 PM	SiCl4 post valve closed
2/22/2011	12:21:56 PM	Main Vac valve closed
2/22/2011	12:21:56 PM	Bypass valve closed
2/22/2011	12:21:56 PM	Helium valve opened
2/22/2011	12:21:56 PM	Bubbler valve opened
2/22/2011	12:21:56 PM	Helium MFC set to  500.000000
2/22/2011	12:21:56 PM	H2 MFC set to  0.000000
2/22/2011	12:21:56 PM	BCl3 MFC set to  0.000000
2/22/2011	12:21:56 PM	PHl3 MFC set to  0.000000
2/22/2011	12:21:56 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:21:56 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:21:57 PM	Tube furnace set to 0
2/22/2011	12:22:02 PM	Helium valve closed
2/22/2011	12:22:02 PM	H2 valve closed
2/22/2011	12:22:02 PM	BCl3 valve closed
2/22/2011	12:22:02 PM	PH3 valve closed
2/22/2011	12:22:02 PM	SiCl4 pre valve closed
2/22/2011	12:22:02 PM	SiCl4 post valve closed
2/22/2011	12:22:02 PM	Main Vac valve closed
2/22/2011	12:22:02 PM	Bypass valve closed
2/22/2011	12:22:02 PM	Bubbler valve closed
2/22/2011	12:22:02 PM	Helium MFC set to  0.000000
2/22/2011	12:22:02 PM	H2 MFC set to  0.000000
2/22/2011	12:22:02 PM	BCl3 MFC set to  0.000000
2/22/2011	12:22:02 PM	PHl3 MFC set to  0.000000
2/22/2011	12:22:02 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:22:02 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:22:03 PM	Tube furnace set to 0
2/22/2011	12:22:03 PM	Run finished at 12:22 PM
2/22/2011	12:24:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	12:24:15 PM	Recipe started at 12:24 PM
2/22/2011	12:24:15 PM	Helium valve closed
2/22/2011	12:24:15 PM	H2 valve closed
2/22/2011	12:24:15 PM	BCl3 valve closed
2/22/2011	12:24:15 PM	PH3 valve closed
2/22/2011	12:24:15 PM	SiCl4 pre valve closed
2/22/2011	12:24:15 PM	SiCl4 post valve closed
2/22/2011	12:24:15 PM	Main Vac valve closed
2/22/2011	12:24:15 PM	Bubbler valve closed
2/22/2011	12:24:15 PM	Bypass valve opened
2/22/2011	12:24:15 PM	Helium MFC set to  0.000000
2/22/2011	12:24:15 PM	H2 MFC set to  0.000000
2/22/2011	12:24:15 PM	BCl3 MFC set to  0.000000
2/22/2011	12:24:15 PM	PHl3 MFC set to  0.000000
2/22/2011	12:24:15 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:24:15 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:24:15 PM	Tube furnace set to 0
2/22/2011	12:24:45 PM	Helium valve closed
2/22/2011	12:24:45 PM	H2 valve closed
2/22/2011	12:24:45 PM	BCl3 valve closed
2/22/2011	12:24:45 PM	PH3 valve closed
2/22/2011	12:24:45 PM	SiCl4 pre valve closed
2/22/2011	12:24:45 PM	SiCl4 post valve closed
2/22/2011	12:24:45 PM	Bubbler valve closed
2/22/2011	12:24:45 PM	Main Vac valve opened
2/22/2011	12:24:45 PM	Bypass valve opened
2/22/2011	12:24:45 PM	Helium MFC set to  0.000000
2/22/2011	12:24:45 PM	H2 MFC set to  0.000000
2/22/2011	12:24:45 PM	BCl3 MFC set to  0.000000
2/22/2011	12:24:45 PM	PHl3 MFC set to  0.000000
2/22/2011	12:24:45 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:24:45 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:24:45 PM	Tube furnace set to 0
2/22/2011	12:24:46 PM	Run finished at 12:24 PM
2/22/2011	12:24:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	12:25:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2011	12:25:49 PM	Recipe started at 12:25 PM
2/22/2011	12:25:49 PM	H2 valve closed
2/22/2011	12:25:49 PM	BCl3 valve closed
2/22/2011	12:25:49 PM	PH3 valve closed
2/22/2011	12:25:49 PM	SiCl4 pre valve closed
2/22/2011	12:25:49 PM	SiCl4 post valve closed
2/22/2011	12:25:49 PM	Main Vac valve closed
2/22/2011	12:25:49 PM	Bypass valve closed
2/22/2011	12:25:49 PM	Bubbler valve closed
2/22/2011	12:25:49 PM	Helium valve opened
2/22/2011	12:25:49 PM	Helium MFC set to  500.000000
2/22/2011	12:25:49 PM	H2 MFC set to  0.000000
2/22/2011	12:25:49 PM	BCl3 MFC set to  0.000000
2/22/2011	12:25:49 PM	PHl3 MFC set to  0.000000
2/22/2011	12:25:49 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:25:49 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:25:49 PM	Tube furnace set to 0
2/22/2011	12:27:04 PM	Helium valve closed
2/22/2011	12:27:04 PM	H2 valve closed
2/22/2011	12:27:04 PM	BCl3 valve closed
2/22/2011	12:27:04 PM	PH3 valve closed
2/22/2011	12:27:04 PM	SiCl4 pre valve closed
2/22/2011	12:27:04 PM	SiCl4 post valve closed
2/22/2011	12:27:04 PM	Main Vac valve closed
2/22/2011	12:27:04 PM	Bypass valve closed
2/22/2011	12:27:04 PM	Bubbler valve closed
2/22/2011	12:27:04 PM	Helium MFC set to  0.000000
2/22/2011	12:27:04 PM	H2 MFC set to  0.000000
2/22/2011	12:27:04 PM	BCl3 MFC set to  0.000000
2/22/2011	12:27:04 PM	PHl3 MFC set to  0.000000
2/22/2011	12:27:04 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:27:04 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:27:04 PM	Tube furnace set to 0
2/22/2011	12:27:04 PM	Run finished at 12:27 PM
2/22/2011	12:27:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/22/2011	12:27:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	12:27:14 PM	Recipe started at 12:27 PM
2/22/2011	12:27:14 PM	Helium valve closed
2/22/2011	12:27:14 PM	H2 valve closed
2/22/2011	12:27:14 PM	BCl3 valve closed
2/22/2011	12:27:14 PM	PH3 valve closed
2/22/2011	12:27:14 PM	SiCl4 pre valve closed
2/22/2011	12:27:14 PM	SiCl4 post valve closed
2/22/2011	12:27:14 PM	Main Vac valve closed
2/22/2011	12:27:14 PM	Bubbler valve closed
2/22/2011	12:27:14 PM	Bypass valve opened
2/22/2011	12:27:14 PM	Helium MFC set to  0.000000
2/22/2011	12:27:14 PM	H2 MFC set to  0.000000
2/22/2011	12:27:14 PM	BCl3 MFC set to  0.000000
2/22/2011	12:27:14 PM	PHl3 MFC set to  0.000000
2/22/2011	12:27:14 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:27:14 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:27:14 PM	Tube furnace set to 0
2/22/2011	12:27:35 PM	Helium valve closed
2/22/2011	12:27:35 PM	H2 valve closed
2/22/2011	12:27:35 PM	BCl3 valve closed
2/22/2011	12:27:35 PM	PH3 valve closed
2/22/2011	12:27:35 PM	SiCl4 pre valve closed
2/22/2011	12:27:35 PM	SiCl4 post valve closed
2/22/2011	12:27:35 PM	Bubbler valve closed
2/22/2011	12:27:35 PM	Main Vac valve opened
2/22/2011	12:27:35 PM	Bypass valve opened
2/22/2011	12:27:35 PM	Helium MFC set to  0.000000
2/22/2011	12:27:35 PM	H2 MFC set to  0.000000
2/22/2011	12:27:35 PM	BCl3 MFC set to  0.000000
2/22/2011	12:27:35 PM	PHl3 MFC set to  0.000000
2/22/2011	12:27:35 PM	SiCl4 MFC set to  0.000000
2/22/2011	12:27:35 PM	Bypass solenoid MFC set to  0.000000
2/22/2011	12:27:35 PM	Tube furnace set to 0
2/22/2011	12:27:36 PM	Run finished at 12:27 PM
2/22/2011	12:27:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/22/2011	1:07:52 PM	H2 valve opened
2/22/2011	1:07:56 PM	H2 MFC set to  500.000000
